Plasma and Charged Particle Analysis for AIP Cathode Development
Improvement of coating properties by cathode design and plasma control
In the vacuum coating deposition process, the status of a plasma* significantly influences the coating properties. The development of an electro-magnetic design for the cathode is critical for plasma control and the resulting coating properties.
*a very active state of a gaseous material in which atoms are ionized into electrons and ions.
Applications
Related SDGs
Relevant KOBELCO products
Relevant products
Features
Crystalline phase control of coating for cutting tools
Variation in plasma irradiation intensity results in different crystal structures and mechanical properties of TiCrAlN coating
A very hard crystalline phase can be obtained by using the newly developed plasma-enhanced cathode.
Erosion resistance of thick TiAlN coating
A low-stress thick coating can be deposited using magnetic field design and plasma control.
Compared to conventional TiN coating, a much improved service life can be expected when a thick TiAlN coating with more than 20um is used. We are planning to apply the coating to steam turbine blades.